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<\/div>Publications<\/strong><\/em><\/p>\n Publications<\/strong><\/em><\/p>\n Publications<\/strong><\/em><\/p>\n <\/p>\n Conference constributions<\/strong><\/em><\/p>\n\n
\n<\/strong>Apparatus for broadband, time-resolved measurements of laser-induced reflectivity transients with sub-10 fs resolution, Optics & Laser Technology (Volume 193, Part B), 114354, https:\/\/doi.org\/10.1016\/j.optlastec.2025.114354 (2026)<\/li>\n<\/ul>\n<\/div>\n<\/div>\n<\/div>\n[\/vc_column_text][\/tab][tab icon_family=”none” title=”2025″ tab_id=”1782903971000-0″ id=”1782903971000-9″][vc_column_text css=”” text_direction=”default”]\n\n
\nTransmission electron microscopy analysis of UV laser implanted gold nanoparticles and their influence on photoluminescence enhancement from silicon nanocrystals, Discover Nano 20<\/strong>, 82 (2025)<\/li>\n<\/ul>\n<\/div>\n<\/div>\n<\/div>\n[\/vc_column_text][\/tab][tab icon_family=”none” title=”2024″ id=”1782903971006-5″ tab_id=”1782903971007-8″][vc_column_text css=”” text_direction=”default”]\n\n
\nSoft X-ray Absorption Spectroscopy with a Flat Liquid Jet in Vacuum Using a Table-Top Laser-Induced Plasma Source, X-Ray Spectrometry, <\/em>Accepted 2024.
\nhttps:\/\/doi.org\/10.1002\/xrs.3474<\/li>\n
\nCompact laser-driven plasma X-ray source for time-resolved diffraction, spectroscopy, and imaging experiments at ELI Beamlines, Journal of Synchrotron Radiation, submitted for publication 2024.<\/li>\n
\nFabrication of Fluidic Submicron-Channels by Pulsed Laser-Induced Buckling of SiOx<\/sub> Films on Fused Silica
\n<\/em>Discover Nano 19<\/strong>, 46 (2024)<\/li>\n<\/ul>\n\n
\nTable-Top System for High-Resolution Soft X-ray Absorption Spectroscopy, European X-ray Spectrometry Conference (EXRS 2024), Athen, Griechenland.<\/li>\n
\nFabrication of Nanofluidic Channels by Pulsed Laser Irradiation of SiOx<\/sub>-coated Fused Silica
\n<\/em>CINSaT Spring Colloquium, Paderborn (03.2024)<\/li>\n
\nFabrication of Nanofluidic Channels by Pulsed Laser Irradiation of SiOx<\/sub>-coated Fused Silica
\n<\/em>DPG Fr\u00fchjahrstagung, Fachverband Oberfl\u00e4chenphysik, Berlin (03.2024)<\/li>\n
\nErzeugung schwarzer Markierungen durch UV-Laser Bestrahlung von TiO2<\/sub>-haltigen
\n<\/em>handels\u00fcblichen Gl\u00e4sern, <\/em>Jahrestagung der Deutschen Gesellschaft f\u00fcr angewandte Optik (DGaO) Aachen (05.2024)<\/li>\n
\nLaser precision microfabrication of optical and fluidic components on the basis of silicon suboxide thin films
\n<\/em>25th International Symposium on Laser Precision Microfabrication (LPM2024), San Sebastian, Spain (05.2024)<\/li>\n
\nBroadband pump probe setup for ultrafast transient reflectivity measurements
Single pulse (\u20181-on-1\u2019) and multiple pulse (\u2018S-on-1\u2019) damage thresholds of coated and uncoated optical elements are measured according to ISO 11254 standard in an automated setup. The on site damage occurrence is detected with online video microscopy and subsequent digital image analysis.<\/p>\n
The degradation behavior of optical components is evaluated under long-term irradiation with defined environmental parameters (e.g. inert gas atmosphere or vacuum, controlled temperature). Online monitoring of transmission \/ reflection allows the optical life time determination of the device.<\/p>\n
Available light sources:<\/strong><\/p>\n Absorption of intense laser radiation causes a thermal load in optical materials leading to local heating of the sample. Subsequentially there are two effects observable:<\/p>\n Each effect induces a reversible change in the optical properties, i.e. in particular a modification of the transmitted wavefront (“thermal lens”) either enhancing or compensating the overall distortion.<\/p>\n Furthermore, in case of amorphous optical materials (e.g. irradiation of Quartz samples with ArF excimer laser), there are irrversible<\/em> changes like compaction leading to changes in density and thus in refracative index.<\/p>\n Both thermal lenses and compaction can be detected in real time with the help of a Hartmann-Shack wavefront sensor (cf. page Wavefront Detection). The image below shows a corresponding measurement of a thermal lens within a ArF laser irradiated (193 nm) Quartz plate. Thermal induced deformation of the wavefront develops inside the material within a few seconds. The optical power of the effect (wpv<\/sub>\u22482nm) corresponds to a converging lens with a focal length of about 10 km.[\/vc_column_text][nectar_btn size=”small” button_style=”regular” button_color_2=”Accent-Color” icon_family=”none” text=”Product flyer: Wavefront Sensor (PDF)” url=”https:\/\/www.ifnano.de\/wp-content\/uploads\/2020\/10\/02_Wellenfrontsensor.pdf”][\/vc_column_inner][vc_column_inner column_padding=”no-extra-padding” column_padding_tablet=”inherit” column_padding_phone=”inherit” column_padding_position=”all” column_element_direction_desktop=”default” column_element_spacing=”default” desktop_text_alignment=”default” tablet_text_alignment=”default” phone_text_alignment=”default” background_color_opacity=”1″ background_hover_color_opacity=”1″ column_backdrop_filter=”none” column_shadow=”none” column_border_radius=”none” column_link_target=”_self” overflow=”visible” gradient_direction=”left_to_right” overlay_strength=”0.3″ width=”1\/2″ tablet_width_inherit=”default” animation_type=”default” bg_image_animation=”none” border_type=”simple” column_border_width=”none” column_border_style=”solid”][image_with_animation image_url=”438″ image_size=”full” animation_type=”entrance” animation=”Fade In” animation_easing=”default” animation_movement_type=”transform_y” hover_animation=”none” alignment=”” img_link_large=”yes” border_radius=”5px” box_shadow=”none” image_loading=”default” max_width=”none” max_width_mobile=”default”][vc_column_text el_class=”img-text”]Thermal lens induced distorted wavefront within Quartz (phase difference in nm-range)[\/vc_column_text][\/vc_column_inner][\/vc_row_inner][\/toggle][toggle color=”Accent-Color” heading_tag=”default” heading_tag_functionality=”default” title=”Absorption \/ Scattering”][vc_row_inner column_margin=”50px” column_direction=”default” column_direction_tablet=”default” column_direction_phone=”default” text_align=”left” row_position=”default” row_position_tablet=”inherit” row_position_phone=”inherit” overflow=”visible” pointer_events=”all”][vc_column_inner column_padding=”no-extra-padding” column_padding_tablet=”inherit” column_padding_phone=”inherit” column_padding_position=”all” column_element_direction_desktop=”default” column_element_spacing=”default” desktop_text_alignment=”default” tablet_text_alignment=”default” phone_text_alignment=”default” background_color_opacity=”1″ background_hover_color_opacity=”1″ column_backdrop_filter=”none” column_shadow=”none” column_border_radius=”none” column_link_target=”_self” overflow=”visible” gradient_direction=”left_to_right” overlay_strength=”0.3″ width=”1\/2″ tablet_width_inherit=”default” animation_type=”default” bg_image_animation=”none” border_type=”simple” column_border_width=”none” column_border_style=”solid”][vc_column_text]\n According to ISO 11551 absolute absorption of optical components is measured by a high resolution (UV-) laser calorimeter which enables the determination of linear as well as non-linear absorption losses in optical materials. For the used irradiation wavelengths (193 nm, 248 nm, 351 nm) a fast evaluation of the long-term behavior of DUV optics at low energy density is possible.<\/p>\n Losses in UV-optics due to scattering are evaluated with a special setup consisting of an excimer laser as light source and a coated Ulbricht’s sphere as integrating detector.<\/p>\n M. Stubenvoll et al.: M. Stubenvoll et al: Photothermal method for absorption measurements in anisotropic crystals, C. G\u00f6rling et al.: C. G\u00f6rling et al.: In order to characterize quality and radiation stability of optical components, e.g. absorption, thermal lensing, damage thresholds and long-term degradation we operate several measuring instruments. Furthermore, propagation and coherence properties of laser radiation are measured with high-resolution wavefront sensors.<\/p>\n Moreover, compact laser-driven plasma sources are developed in order to generate extreme ultraviolet (EUV) radiation and soft x-rays being used for several metrological applications such as absorption spectroscopy (NEXFAS), reflectometry and microscopy within the \u2018water window\u2019 (\u03bb = 2.2 \u2013 4.4 nm). In addition, stability and damage threshold measurements are conducted for EUV relevant materials and sensors at \u03bb = 13.5 nm using appropriate beam shaping optics.[\/vc_column_text][\/vc_column_inner][vc_column_inner column_padding=”no-extra-padding” column_padding_tablet=”inherit” column_padding_phone=”inherit” column_padding_position=”all” column_element_direction_desktop=”default” column_element_spacing=”default” desktop_text_alignment=”default” tablet_text_alignment=”default” phone_text_alignment=”default” background_color_opacity=”1″ background_hover_color_opacity=”1″ column_backdrop_filter=”none” column_shadow=”none” column_border_radius=”none” column_link_target=”_self” overflow=”visible” gradient_direction=”left_to_right” overlay_strength=”0.3″ width=”1\/2″ tablet_width_inherit=”default” animation_type=”default” bg_image_animation=”none” border_type=”simple” column_border_width=”none” column_border_style=”solid”][image_with_animation image_url=”428″ image_size=”full” animation_type=”entrance” animation=”Fade In” animation_easing=”default” animation_movement_type=”transform_y” hover_animation=”none” alignment=”” img_link_large=”yes” border_radius=”none” box_shadow=”none” image_loading=”default” max_width=”100%” max_width_mobile=”default”][vc_column_text el_class=”img-text”]Damage (left) and wavefront distortion (right) of a Quartz optic due to irradiation with intense UV laser radiation[\/vc_column_text][\/vc_column_inner][\/vc_row_inner][toggles style=”minimal_small”][toggle color=”Accent-Color” heading_tag=”default” heading_tag_functionality=”default” title=”Stability of (UV-)optics”][vc_row_inner column_margin=”50px” column_direction=”default” column_direction_tablet=”default” column_direction_phone=”default” text_align=”left” row_position=”default” row_position_tablet=”inherit” row_position_phone=”inherit” overflow=”visible” pointer_events=”all”][vc_column_inner column_padding=”no-extra-padding” column_padding_tablet=”inherit” column_padding_phone=”inherit” column_padding_position=”all” column_element_direction_desktop=”default” column_element_spacing=”default” desktop_text_alignment=”default” tablet_text_alignment=”default” phone_text_alignment=”default” background_color_opacity=”1″ background_hover_color_opacity=”1″ column_backdrop_filter=”none” column_shadow=”none” column_border_radius=”none” column_link_target=”_self” overflow=”visible” gradient_direction=”left_to_right” overlay_strength=”0.3″ width=”1\/2″ tablet_width_inherit=”default” animation_type=”default” bg_image_animation=”none” border_type=”simple” column_border_width=”none” column_border_style=”solid”][vc_column_text]\n Single pulse (\u20181-on-1\u2019) and multiple pulse (\u2018S-on-1\u2019) damage thresholds of coated and uncoated optical elements are measured according to ISO 11254 standard in an automated setup. The on site damage occurrence is detected with online video microscopy and subsequent digital image analysis.<\/p>\n The degradation behavior of optical components is evaluated under long-term irradiation with defined environmental parameters (e.g. inert gas atmosphere or vacuum, controlled temperature). Online monitoring of transmission \/ reflection allows the optical life time determination of the device.<\/p>\n Available light sources:<\/strong><\/p>\n Absorption of intense laser radiation causes a thermal load in optical materials leading to local heating of the sample. Subsequentially there are two effects observable:<\/p>\n Each effect induces a reversible change in the optical properties, i.e. in particular a modification of the transmitted wavefront (“thermal lens”) either enhancing or compensating the overall distortion.<\/p>\n Furthermore, in case of amorphous optical materials (e.g. irradiation of Quartz samples with ArF excimer laser), there are irrversible<\/em> changes like compaction leading to changes in density and thus in refracative index.<\/p>\n Both thermal lenses and compaction can be detected in real time with the help of a Hartmann-Shack wavefront sensor (cf. page Wavefront Detection). The image below shows a corresponding measurement of a thermal lens within a ArF laser irradiated (193 nm) Quartz plate. Thermal induced deformation of the wavefront develops inside the material within a few seconds. The optical power of the effect (wpv<\/sub>\u22482nm) corresponds to a converging lens with a focal length of about 10 km.[\/vc_column_text][nectar_btn size=”small” button_style=”regular” button_color_2=”Accent-Color” icon_family=”none” text=”Product flyer: Wavefront Sensor (PDF)” url=”https:\/\/www.ifnano.de\/wp-content\/uploads\/2020\/10\/02_Wellenfrontsensor.pdf”][\/vc_column_inner][vc_column_inner column_padding=”no-extra-padding” column_padding_tablet=”inherit” column_padding_phone=”inherit” column_padding_position=”all” column_element_direction_desktop=”default” column_element_spacing=”default” desktop_text_alignment=”default” tablet_text_alignment=”default” phone_text_alignment=”default” background_color_opacity=”1″ background_hover_color_opacity=”1″ column_backdrop_filter=”none” column_shadow=”none” column_border_radius=”none” column_link_target=”_self” overflow=”visible” gradient_direction=”left_to_right” overlay_strength=”0.3″ width=”1\/2″ tablet_width_inherit=”default” animation_type=”default” bg_image_animation=”none” border_type=”simple” column_border_width=”none” column_border_style=”solid”][image_with_animation image_url=”438″ image_size=”full” animation_type=”entrance” animation=”Fade In” animation_easing=”default” animation_movement_type=”transform_y” hover_animation=”none” alignment=”” img_link_large=”yes” border_radius=”5px” box_shadow=”none” image_loading=”default” max_width=”none” max_width_mobile=”default”][vc_column_text el_class=”img-text”]Thermal lens induced distorted wavefront within Quartz (phase difference in nm-range)[\/vc_column_text][\/vc_column_inner][\/vc_row_inner][\/toggle][toggle color=”Accent-Color” heading_tag=”default” heading_tag_functionality=”default” title=”Absorption \/ Scattering”][vc_row_inner column_margin=”50px” column_direction=”default” column_direction_tablet=”default” column_direction_phone=”default” text_align=”left” row_position=”default” row_position_tablet=”inherit” row_position_phone=”inherit” overflow=”visible” pointer_events=”all”][vc_column_inner column_padding=”no-extra-padding” column_padding_tablet=”inherit” column_padding_phone=”inherit” column_padding_position=”all” column_element_direction_desktop=”default” column_element_spacing=”default” desktop_text_alignment=”default” tablet_text_alignment=”default” phone_text_alignment=”default” background_color_opacity=”1″ background_hover_color_opacity=”1″ column_backdrop_filter=”none” column_shadow=”none” column_border_radius=”none” column_link_target=”_self” overflow=”visible” gradient_direction=”left_to_right” overlay_strength=”0.3″ width=”1\/2″ tablet_width_inherit=”default” animation_type=”default” bg_image_animation=”none” border_type=”simple” column_border_width=”none” column_border_style=”solid”][vc_column_text]\n According to ISO 11551 absolute absorption of optical components is measured by a high resolution (UV-) laser calorimeter which enables the determination of linear as well as non-linear absorption losses in optical materials. For the used irradiation wavelengths (193 nm, 248 nm, 351 nm) a fast evaluation of the long-term behavior of DUV optics at low energy density is possible.<\/p>\n Losses in UV-optics due to scattering are evaluated with a special setup consisting of an excimer laser as light source and a coated Ulbricht’s sphere as integrating detector.<\/p>\n M. Stubenvoll et al.: M. Stubenvoll et al: Photothermal method for absorption measurements in anisotropic crystals, C. G\u00f6rling et al.: C. G\u00f6rling et al.: For assessment of the light field’s phase distribution apart from mere beam profiling, camera based wavefront sensors according to the Hartmann-Shack principle are being utilized. The determination of (interpolated) beam profile, wavefront and beam parameters such as diameter, divergence and M\u00b2 value for coherent radiation enables a complete description of the propagation behavior (cf. Figure 1) via solution of the Fresnel diffraction integral. Thus, the intensity distribution e.g. in far field or at the beam waist may be calculated. The derivation of these values from a single measurement with an accuracy of a few percent makes the device especially suitable for pulsed or strongly fluctuating laser sources.<\/p>\n The wavefront sensor is available as a commercial product, distributed by LOT Quantum Design for the European market (USA: Lightspeed Technologies), that is already applied by several companies and institutes.[\/vc_column_text][nectar_btn size=”small” open_new_tab=”true” button_style=”regular” button_color_2=”Accent-Color” icon_family=”none” text=”Product flyer “Wavefront sensor“ (PDF)” url=”https:\/\/www.ifnano.de\/wp-content\/uploads\/2020\/10\/02_Wellenfrontsensor.pdf”][\/vc_column_inner][vc_column_inner column_padding=”no-extra-padding” column_padding_tablet=”inherit” column_padding_phone=”inherit” column_padding_position=”all” column_element_direction_desktop=”default” column_element_spacing=”default” desktop_text_alignment=”default” tablet_text_alignment=”default” phone_text_alignment=”default” background_color_opacity=”1″ background_hover_color_opacity=”1″ column_backdrop_filter=”none” column_shadow=”none” column_border_radius=”none” column_link_target=”_self” overflow=”visible” gradient_direction=”left_to_right” overlay_strength=”0.3″ width=”1\/2″ tablet_width_inherit=”default” animation_type=”default” bg_image_animation=”none” border_type=”simple” column_border_width=”none” column_border_style=”solid”][image_with_animation image_url=”448″ image_size=”full” animation_type=”entrance” animation=”Fade In” animation_easing=”default” animation_movement_type=”transform_y” hover_animation=”none” alignment=”” img_link_large=”yes” border_radius=”5px” box_shadow=”none” image_loading=”default” max_width=”100%” max_width_mobile=”default”][vc_column_text el_class=”img-text”]Wavefront sensor for the visible light (left) and for EUV and soft x-ray radiation (right)[\/vc_column_text][\/vc_column_inner][\/vc_row_inner][\/toggle][toggle color=”Accent-Color” heading_tag=”default” heading_tag_functionality=”default” title=”Coherence analyses \/ Measurement of 4D coherence function”][vc_row_inner column_margin=”50px” column_direction=”default” column_direction_tablet=”default” column_direction_phone=”default” text_align=”left” row_position=”default” row_position_tablet=”inherit” row_position_phone=”inherit” overflow=”visible” pointer_events=”all”][vc_column_inner column_padding=”no-extra-padding” column_padding_tablet=”inherit” column_padding_phone=”inherit” column_padding_position=”all” column_element_direction_desktop=”default” column_element_spacing=”default” desktop_text_alignment=”default” tablet_text_alignment=”default” phone_text_alignment=”default” background_color_opacity=”1″ background_hover_color_opacity=”1″ column_backdrop_filter=”none” column_shadow=”none” column_border_radius=”none” column_link_target=”_self” overflow=”visible” gradient_direction=”left_to_right” overlay_strength=”0.3″ width=”2\/3″ tablet_width_inherit=”default” animation_type=”default” bg_image_animation=”none” border_type=”simple” column_border_width=”none” column_border_style=”solid”][vc_column_text]The high degree of coherence is one of the most important characteristics of laser light which allows for numerous applications. Using Young\u2019s double slit experiment only the basic coherence properties of a beam can be measured as the entire spatial coherence function is four-dimensional.<\/p>\n We pursue the formalism of the Wigner distribution function representing the Fourier transform of the mutual coherence function, which includes all information on the spatial coherence properties of the radiation field. The Wigner distribution function can be accessed experimentally by caustic scans and is reconstructed by an algorithm mapping the measured beam profiles into a four-dimensional phase space. As a result, the global degree of coherence, coherence lengths and beam characteristics such as wavefront, 4D propagation matrix and M\u00b2 value can be deduced easily.<\/p>\n The method of the Wigner distribution function is suitable for laser beams in a broad spectral range from NIR to EUV and soft x-rays.[\/vc_column_text][\/vc_column_inner][vc_column_inner column_padding=”no-extra-padding” column_padding_tablet=”inherit” column_padding_phone=”inherit” column_padding_position=”all” column_element_direction_desktop=”default” column_element_spacing=”default” desktop_text_alignment=”default” tablet_text_alignment=”default” phone_text_alignment=”default” background_color_opacity=”1″ background_hover_color_opacity=”1″ column_backdrop_filter=”none” column_shadow=”none” column_border_radius=”none” column_link_target=”_self” overflow=”visible” gradient_direction=”left_to_right” overlay_strength=”0.3″ width=”1\/3″ tablet_width_inherit=”default” animation_type=”default” bg_image_animation=”none” border_type=”simple” column_border_width=”none” column_border_style=”solid”][image_with_animation image_url=”451″ image_size=”full” animation_type=”entrance” animation=”Fade In” animation_easing=”default” animation_movement_type=”transform_y” hover_animation=”none” alignment=”” img_link_large=”yes” border_radius=”5px” box_shadow=”none” image_loading=”default” max_width=”100%” max_width_mobile=”default”][vc_column_text el_class=”img-text”]Profiles of a caustic scan measured at the free-electron laser FLASH (wavelength 13 nm, top), reconstructed Wigner distribution function as projection (middle) and consequent beam profiles (bottom) matching the measured profiles very well. Here the global degree of coherence is K = 0.02[\/vc_column_text][\/vc_column_inner][\/vc_row_inner][\/toggle][toggle color=”Accent-Color” heading_tag=”default” heading_tag_functionality=”default” title=”Further information”][vc_row_inner column_margin=”default” column_direction=”default” column_direction_tablet=”default” column_direction_phone=”default” text_align=”left” row_position=”default” row_position_tablet=”inherit” row_position_phone=”inherit” overflow=”visible” pointer_events=”all”][vc_column_inner column_padding=”no-extra-padding” column_padding_tablet=”inherit” column_padding_phone=”inherit” column_padding_position=”all” column_element_direction_desktop=”default” column_element_spacing=”default” desktop_text_alignment=”default” tablet_text_alignment=”default” phone_text_alignment=”default” background_color_opacity=”1″ background_hover_color_opacity=”1″ column_backdrop_filter=”none” column_shadow=”none” column_border_radius=”none” column_link_target=”_self” overflow=”visible” gradient_direction=”left_to_right” overlay_strength=”0.3″ width=”1\/2″ tablet_width_inherit=”default” animation_type=”default” bg_image_animation=”none” border_type=”simple” column_border_width=”none” column_border_style=”solid”][vc_column_text]\n B. Fl\u00f6ter et al.: B. Fl\u00f6ter et al.: B. Sch\u00e4fer, K. Mann: B. Sch\u00e4fer et al: T. Mey et al:\n
\n
\n
Scattering<\/h4>\n
\n
Wavefront deformation \/ Thermal lenses<\/h5>\n
\nMeasurement and compensation of laser-induced wavefront deformations and focal shifts in near IR optics, Opt. Expr. 22<\/strong> (21) (2014)<\/p>\n
\nRev. Sci. Instr. 87<\/strong> (2016)[\/vc_column_text][\/vc_column_inner][vc_column_inner column_padding=”no-extra-padding” column_padding_tablet=”inherit” column_padding_phone=”inherit” column_padding_position=”all” column_element_direction_desktop=”default” column_element_spacing=”default” desktop_text_alignment=”default” tablet_text_alignment=”default” phone_text_alignment=”default” background_color_opacity=”1″ background_hover_color_opacity=”1″ column_backdrop_filter=”none” column_shadow=”none” column_border_radius=”none” column_link_target=”_self” overflow=”visible” gradient_direction=”left_to_right” overlay_strength=”0.3″ width=”1\/2″ tablet_width_inherit=”default” animation_type=”default” bg_image_animation=”none” border_type=”simple” column_border_width=”none” column_border_style=”solid”][vc_column_text]\nAbsorption \/ Scattering<\/h5>\n
\nComparative studies of absorptance behaviour of alkaline-earth fluorides at 193 nm and 157 nm,
\nAppl. Phys. B. 74<\/strong> (3) (2002)<\/p>\n
\nSurface and bulk absorption in CaF2 at 193 and 157nm, Opt. Comm. 249<\/strong> (1-3) (2005)[\/vc_column_text][\/vc_column_inner][\/vc_row_inner][\/toggle][\/toggles][\/vc_column][\/vc_row][vc_row type=”full_width_background” full_screen_row_position=”middle” column_margin=”default” column_direction=”default” column_direction_tablet=”default” column_direction_phone=”default” bg_color=”#f4f7fb” scene_position=”center” top_padding=”5%” constrain_group_1=”yes” bottom_padding=”5%” text_color=”dark” text_align=”left” row_border_radius=”none” row_border_radius_applies=”bg” overflow=”visible” id=”Optik-Charakterisierung” overlay_strength=”0.3″ gradient_direction=”left_to_right” shape_divider_position=”bottom” bg_image_animation=”none” shape_type=””][vc_column column_padding=”no-extra-padding” column_padding_tablet=”inherit” column_padding_phone=”inherit” column_padding_position=”all” column_element_direction_desktop=”default” column_element_spacing=”default” desktop_text_alignment=”default” tablet_text_alignment=”default” phone_text_alignment=”default” background_color_opacity=”1″ background_hover_color_opacity=”1″ column_backdrop_filter=”none” column_shadow=”none” column_border_radius=”none” column_link_target=”_self” column_position=”default” gradient_direction=”left_to_right” overlay_strength=”0.3″ width=”1\/1″ tablet_width_inherit=”default” animation_type=”default” bg_image_animation=”none” border_type=”simple” column_border_width=”none” column_border_style=”solid”][vc_column_text]\nOptics characterization<\/h2>\n[\/vc_column_text][vc_row_inner column_margin=”50px” column_direction=”default” column_direction_tablet=”default” column_direction_phone=”default” text_align=”left” row_position=”default” row_position_tablet=”inherit” row_position_phone=”inherit” overflow=”visible” pointer_events=”all”][vc_column_inner column_padding=”no-extra-padding” column_padding_tablet=”inherit” column_padding_phone=”inherit” column_padding_position=”all” column_element_direction_desktop=”default” column_element_spacing=”default” desktop_text_alignment=”default” tablet_text_alignment=”default” phone_text_alignment=”default” background_color_opacity=”1″ background_hover_color_opacity=”1″ column_backdrop_filter=”none” column_shadow=”none” column_border_radius=”none” column_link_target=”_self” overflow=”visible” gradient_direction=”left_to_right” overlay_strength=”0.3″ width=”1\/2″ tablet_width_inherit=”default” animation_type=”default” bg_image_animation=”none” border_type=”simple” column_border_width=”none” column_border_style=”solid”][vc_column_text css=”” text_direction=”default”]The Short Wavelengths department is concerned with the characterization of laser light sources as well as high quality optics for beam steering and shaping. One focus is put on the deep UV wavelengths (193 nm, 248 nm) relevant for semiconductor microlithography; all other laser relevant wavelengths are also available.<\/p>\n
\n
\n
\n
\n
Scattering<\/h4>\n
\n
Wavefront deformation \/ Thermal lenses<\/h5>\n
\nMeasurement and compensation of laser-induced wavefront deformations and focal shifts in near IR optics, Opt. Expr. 22<\/strong> (21) (2014)<\/p>\n
\nRev. Sci. Instr. 87<\/strong> (2016)[\/vc_column_text][\/vc_column_inner][vc_column_inner column_padding=”no-extra-padding” column_padding_tablet=”inherit” column_padding_phone=”inherit” column_padding_position=”all” column_element_direction_desktop=”default” column_element_spacing=”default” desktop_text_alignment=”default” tablet_text_alignment=”default” phone_text_alignment=”default” background_color_opacity=”1″ background_hover_color_opacity=”1″ column_backdrop_filter=”none” column_shadow=”none” column_border_radius=”none” column_link_target=”_self” overflow=”visible” gradient_direction=”left_to_right” overlay_strength=”0.3″ width=”1\/2″ tablet_width_inherit=”default” animation_type=”default” bg_image_animation=”none” border_type=”simple” column_border_width=”none” column_border_style=”solid”][vc_column_text]\nAbsorption \/ Scattering<\/h5>\n
\nComparative studies of absorptance behaviour of alkaline-earth fluorides at 193 nm and 157 nm,
\nAppl. Phys. B. 74<\/strong> (3) (2002)<\/p>\n
\nSurface and bulk absorption in CaF2 at 193 and 157nm, Opt. Comm. 249<\/strong> (1-3) (2005)[\/vc_column_text][\/vc_column_inner][\/vc_row_inner][\/toggle][\/toggles][\/vc_column][\/vc_row][vc_row type=”full_width_background” full_screen_row_position=”middle” column_margin=”default” column_direction=”default” column_direction_tablet=”default” column_direction_phone=”default” scene_position=”center” top_padding=”5%” constrain_group_1=”yes” bottom_padding=”5%” text_color=”dark” text_align=”left” row_border_radius=”none” row_border_radius_applies=”bg” overflow=”visible” id=”Strahlpropagation” overlay_strength=”0.3″ gradient_direction=”left_to_right” shape_divider_position=”bottom” bg_image_animation=”none” shape_type=””][vc_column column_padding=”no-extra-padding” column_padding_tablet=”inherit” column_padding_phone=”inherit” column_padding_position=”all” column_element_direction_desktop=”default” column_element_spacing=”default” desktop_text_alignment=”default” tablet_text_alignment=”default” phone_text_alignment=”default” background_color_opacity=”1″ background_hover_color_opacity=”1″ column_backdrop_filter=”none” column_shadow=”none” column_border_radius=”none” column_link_target=”_self” column_position=”default” gradient_direction=”left_to_right” overlay_strength=”0.3″ width=”1\/1″ tablet_width_inherit=”default” animation_type=”default” bg_image_animation=”none” border_type=”simple” column_border_width=”none” column_border_style=”solid”][vc_row_inner column_margin=”50px” column_direction=”default” column_direction_tablet=”default” column_direction_phone=”default” text_align=”left” row_position=”default” row_position_tablet=”inherit” row_position_phone=”inherit” overflow=”visible” pointer_events=”all”][vc_column_inner column_padding=”no-extra-padding” column_padding_tablet=”inherit” column_padding_phone=”inherit” column_padding_position=”all” column_element_direction_desktop=”default” column_element_spacing=”default” desktop_text_alignment=”default” tablet_text_alignment=”default” phone_text_alignment=”default” background_color_opacity=”1″ background_hover_color_opacity=”1″ column_backdrop_filter=”none” column_shadow=”none” column_border_radius=”none” column_link_target=”_self” overflow=”visible” gradient_direction=”left_to_right” overlay_strength=”0.3″ width=”3\/4″ tablet_width_inherit=”default” animation_type=”default” bg_image_animation=”none” border_type=”simple” column_border_width=”none” column_border_style=”solid”][vc_column_text]\nBeam propagation<\/h2>\n[\/vc_column_text][vc_column_text]Modern applications in laser technology demand a comprehensive characterization of the utilized light sources. This makes high precision techniques for determination of the spatial profile as well as standard methods for relevant beam parameters necessary. The Optics \/ Short Wavelengths department of the Laser-Laboratorium e.V. has been for more than 20 years involved with the comprehensive characterization of laser beam propagation. The applied camera-based detectors are suitable for a broad spectral range (NIR … DUV\/EUV).[\/vc_column_text][\/vc_column_inner][vc_column_inner column_padding=”no-extra-padding” column_padding_tablet=”inherit” column_padding_phone=”inherit” column_padding_position=”all” column_element_direction_desktop=”default” column_element_spacing=”default” desktop_text_alignment=”default” tablet_text_alignment=”default” phone_text_alignment=”default” background_color_opacity=”1″ background_hover_color_opacity=”1″ column_backdrop_filter=”none” column_shadow=”none” column_border_radius=”none” column_link_target=”_self” overflow=”visible” gradient_direction=”left_to_right” overlay_strength=”0.3″ width=”1\/4″ tablet_width_inherit=”default” animation_type=”default” bg_image_animation=”none” border_type=”simple” column_border_width=”none” column_border_style=”solid”][image_with_animation image_url=”445″ image_size=”full” animation_type=”entrance” animation=”Fade In” animation_easing=”default” animation_movement_type=”transform_y” hover_animation=”none” alignment=”” border_radius=”none” box_shadow=”none” image_loading=”default” max_width=”100%” max_width_mobile=”default”][vc_column_text el_class=”img-text”]Beam profile and wavefront of an excimer laser[\/vc_column_text][\/vc_column_inner][\/vc_row_inner][toggles style=”minimal_small”][toggle color=”Accent-Color” heading_tag=”default” heading_tag_functionality=”default” title=”Beam profiling”][vc_row_inner column_margin=”50px” column_direction=”default” column_direction_tablet=”default” column_direction_phone=”default” text_align=”left” row_position=”default” row_position_tablet=”inherit” row_position_phone=”inherit” overflow=”visible” pointer_events=”all”][vc_column_inner column_padding=”no-extra-padding” column_padding_tablet=”inherit” column_padding_phone=”inherit” column_padding_position=”all” column_element_direction_desktop=”default” column_element_spacing=”default” desktop_text_alignment=”default” tablet_text_alignment=”default” phone_text_alignment=”default” background_color_opacity=”1″ background_hover_color_opacity=”1″ column_backdrop_filter=”none” column_shadow=”none” column_border_radius=”none” column_link_target=”_self” overflow=”visible” gradient_direction=”left_to_right” overlay_strength=”0.3″ width=”1\/2″ tablet_width_inherit=”default” animation_type=”default” bg_image_animation=”none” border_type=”simple” column_border_width=”none” column_border_style=”solid”][vc_column_text]Laser applications in industry and science often demand the highest beam stability as well as accurate spatial profile control. Thus, the determination of high resolution intensity distribution and beam parameters is essential. The Optics \/ Short Wavelengths department offers the comprehensive characterization of laser beams over a broad spectral range. For this task camera-based systems for measurement of near-field and far-field profiles which are sufficient to calculate laser parameters according to ISO-norm (ISO 11146, ISO 13694, ISO 15367). The optimized combination of UV converters with CCD cameras is suitable for important laser wavelengths from NIR (e.g. Nd:YAG) to DUV (ArF excimer laser), EUV (13.5 nm) and soft x-rays (1 \u2013 5 n).[\/vc_column_text][\/vc_column_inner][vc_column_inner column_padding=”no-extra-padding” column_padding_tablet=”inherit” column_padding_phone=”inherit” column_padding_position=”all” column_element_direction_desktop=”default” column_element_spacing=”default” desktop_text_alignment=”default” tablet_text_alignment=”default” phone_text_alignment=”default” background_color_opacity=”1″ background_hover_color_opacity=”1″ column_backdrop_filter=”none” column_shadow=”none” column_border_radius=”none” column_link_target=”_self” overflow=”visible” gradient_direction=”left_to_right” overlay_strength=”0.3″ width=”1\/2″ tablet_width_inherit=”default” animation_type=”default” bg_image_animation=”none” border_type=”simple” column_border_width=”none” column_border_style=”solid”][image_with_animation image_url=”447″ image_size=”full” animation_type=”entrance” animation=”Fade In” animation_easing=”default” animation_movement_type=”transform_y” hover_animation=”none” alignment=”” img_link_large=”yes” border_radius=”5px” box_shadow=”none” image_loading=”default” max_width=”100%” max_width_mobile=”default”][vc_column_text el_class=”img-text”]Measured intensity profiles of different lasers[\/vc_column_text][vc_column_text]\n
\n
Wellenfront-Sensorik<\/h5>\n
\nEUV Hartmann sensor for wavefront measurements at the Free-electron LASer in Hamburg,
\nNew J. Phys. 12<\/strong> (2010)<\/p>\n
\nBeam parameters of FLASH beamline BL1 from Hartmann wavefront measurements,
\nNucl. Instr. Meth. Phys. Res. 635<\/strong> (2011)[\/vc_column_text][\/vc_column_inner][vc_column_inner column_padding=”no-extra-padding” column_padding_tablet=”inherit” column_padding_phone=”inherit” column_padding_position=”all” column_element_direction_desktop=”default” column_element_spacing=”default” desktop_text_alignment=”default” tablet_text_alignment=”default” phone_text_alignment=”default” background_color_opacity=”1″ background_hover_color_opacity=”1″ column_backdrop_filter=”none” column_shadow=”none” column_border_radius=”none” column_link_target=”_self” overflow=”visible” gradient_direction=”left_to_right” overlay_strength=”0.3″ width=”1\/2″ tablet_width_inherit=”default” animation_type=”default” bg_image_animation=”none” border_type=”simple” column_border_width=”none” column_border_style=”solid”][vc_column_text]\nKoh\u00e4renz-Analyse \/ Messung der 4D-Koh\u00e4renzfunktion<\/h5>\n
\n\u201cCharacterization of an ArF excimer laser beam from measurements of the Wigner distribution function\u201d, New J. Phys. 13 (2011)<\/p>\n
\n\u201cFEL beam characterization from measurements of the Wigner distribution function\u201d, Nucl. Instr. Meth. Phys. Res. 654 (2011)<\/p>\n
\n\u201cWigner distribution measurements of the spatial coherence properties of the free electron laser FLASH\u201d, Opt. Expr. 20 (2011)[\/vc_column_text][\/vc_column_inner][\/vc_row_inner][\/toggle][\/toggles][\/vc_column][\/vc_row][vc_row type=”full_width_background” full_screen_row_position=”middle” column_margin=”default” column_direction=”default” column_direction_tablet=”default” column_direction_phone=”default” bg_color=”#f4f7fb” scene_position=”center” top_padding=”5%” constrain_group_1=”yes” bottom_padding=”5%” text_color=”dark” text_align=”left” row_border_radius=”none” row_border_radius_applies=”bg” overflow=”visible” id=”EUV-Strahlung” overlay_strength=”0.3″ gradient_direction=”left_to_right” shape_divider_position=”bottom” bg_image_animation=”none” shape_type=””][vc_column column_padding=”no-extra-padding” column_padding_tablet=”inherit” column_padding_phone=”inherit” column_padding_position=”all” column_element_direction_desktop=”default” column_element_spacing=”default” desktop_text_alignment=”default” tablet_text_alignment=”default” phone_text_alignment=”default” background_color_opacity=”1″ background_hover_color_opacity=”1″ column_backdrop_filter=”none” column_shadow=”none” column_border_radius=”none” column_link_target=”_self” column_position=”default” gradient_direction=”left_to_right” overlay_strength=”0.3″ width=”1\/1″ tablet_width_inherit=”default” animation_type=”default” bg_image_animation=”none” border_type=”simple” column_border_width=”none” column_border_style=”solid”][vc_row_inner column_margin=”50px” column_direction=”default” column_direction_tablet=”default” column_direction_phone=”default” text_align=”left” row_position=”default” row_position_tablet=”inherit” row_position_phone=”inherit” overflow=”visible” pointer_events=”all”][vc_column_inner column_padding=”no-extra-padding” column_padding_tablet=”inherit” column_padding_phone=”inherit” column_padding_position=”all” column_element_direction_desktop=”default” column_element_spacing=”default” desktop_text_alignment=”default” tablet_text_alignment=”default” phone_text_alignment=”default” background_color_opacity=”1″ background_hover_color_opacity=”1″ column_backdrop_filter=”none” column_shadow=”none” column_border_radius=”none” column_link_target=”_self” overflow=”visible” gradient_direction=”left_to_right” overlay_strength=”0.3″ width=”3\/4″ tablet_width_inherit=”default” animation_type=”default” bg_image_animation=”none” border_type=”simple” column_border_width=”none” column_border_style=”solid”][vc_column_text]\nEUV and soft X-ray radiation<\/h2>\n[\/vc_column_text][vc_column_text]With the help of highly excited laser-induced plasmas as compact light sources, metrology tools for the EUV\/XUV spectral range (\u03bb=1\u202630nm) are being developed within the department. These sources and tools enable laboratory scaled setups e.g. for spectrometry, reflectometry or stability tests independent of synchrotron radiation leading to the capability of in-house EUV\/XUV material studies.[\/vc_column_text][vc_column_text]Presentation<\/strong><\/p>\n